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Advanced interferometry systems for dimensional measurement in nanometrology
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SYSNO ASEP 0441274 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Advanced interferometry systems for dimensional measurement in nanometrology Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Holá, Miroslava (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Vychodil, M. (CZ)
Sedlář, P. (CZ)
Provazník, M. (CZ)Number of authors 8 Source Title Optics and Measurement Conference 2014 (Proceedings of SPIE 9442). - Bellingham : SPIE, 2014 - ISSN 0277-786X - ISBN 9781628415575 Pages 94420p: 1-6 Number of pages 6 s. Publication form Online - E Action Optics and Measurement Conference 2014 (OaM 2014) Event date 07.10.2014-10.10.2014 VEvent location Liberec Country CZ - Czech Republic Event type WRD Language eng - English Country US - United States Keywords interferometry ; highly-coherent lasers ; signal processing Subject RIV BH - Optics, Masers, Lasers R&D Projects GB14-36681G GA ČR - Czech Science Foundation (CSF) TA02010711 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TA01010995 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000349403500024 EID SCOPUS 84922764371 DOI 10.1117/12.2086613 Annotation We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta – optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika. The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology together with a design of a machine for processing and polishing of high-precision flat-surface optical components. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2016
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