Number of the records: 1
Advanced interferometry systems for dimensional measurement in nanometrology
- 1.Lazar, Josef - Holá, Miroslava - Hrabina, Jan - Oulehla, Jindřich - Číp, Ondřej - Vychodil, M. - Sedlář, P. - Provazník, M.
Advanced interferometry systems for dimensional measurement in nanometrology.
Optics and Measurement Conference 2014 (Proceedings of SPIE 9442). Bellingham: SPIE, 2014, 94420P: 1-6. ISBN 9781628415575. ISSN 0277-786X.
[Optics and Measurement Conference 2014 (OaM 2014). Liberec (CZ), 07.10.2014-10.10.2014]
http://hdl.handle.net/11104/0246973
Number of the records: 1