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Advanced interferometry systems for dimensional measurement in nanometrology
- 1.LAZAR, J., HOLÁ, M., HRABINA, J., OULEHLA, J., ČÍP, O., VYCHODIL, M., SEDLÁŘ, P., PROVAZNÍK, M. Advanced interferometry systems for dimensional measurement in nanometrology. In: Optics and Measurement Conference 2014 (Proceedings of SPIE 9442). Bellingham: SPIE, 2014, 94420P: 1-6. ISBN 9781628415575. ISSN 0277-786X. Available: doi: 10.1117/12.2086613
Number of the records: 1