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Advanced interferometry systems for dimensional measurement in nanometrology
- 1.LAZAR, Josef, HOLÁ, Miroslava, HRABINA, Jan, OULEHLA, Jindřich, ČÍP, Ondřej, VYCHODIL, M., SEDLÁŘ, P., PROVAZNÍK, M. Advanced interferometry systems for dimensional measurement in nanometrology. In: Optics and Measurement Conference 2014 (Proceedings of SPIE 9442). Bellingham: SPIE, 2014, 94420P: 1-6. ISBN 9781628415575. ISSN 0277-786X. Available: doi: 10.1117/12.2086613
Number of the records: 1