Innovation possibilities of scintillation electron detector for SEM

0434107 - ÚPT 2015 RIV CZ eng C - Conference Paper (international conference)
Schauer, Petr - Bok, Jan
Innovation possibilities of scintillation electron detector for SEM.
18th International Microscopy Congres. Proceedings. Praha: Czechoslovak Microscopy Society, 2014. ISBN 978-80-260-6720-7.
[International Microscopy Congres /18./. Praha (CZ), 07.09.2014-12.09.2014]
R&D Projects: GA TA ČR TE01020118; GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : electron detector * scintillator * cathodoluminescence * single crystal * SEM * DQE * MTF
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

To evaluate performance of a scintillation detection system for SEM, it is necessary to consider many scintillator parameters. Various attributes of the scintillator for the SEM electron detector are listed in. The very important parameters are those affecting the detective quantum efficiency (DQE) which is primarily a measure of image noise. Not a less important indicator of image quality is the modulation transfer function (MTF) which describes the ability to show fine image details. Therefore, using a scanning imaging system, the detector bandwidth, which is given especially by the scintillator decay time, is the key to the good MTF. Currently, the YAG:Ce single crystal scintillator (introduced already in 1978 having somewhat limiting decay characteristic is the most frequently used scintillator in the SEM. The aim of this paper is to outline possibilities of scintillator innovation to get the improved MTF and DQE.
Permanent Link: http://hdl.handle.net/11104/0238242