Simulation of space charge effects in electron optical systems based on the calculation of current density

0431337 - ÚPT 2015 CZ eng A - Abstract
Zelinka, Jiří - Oral, Martin - Radlička, Tomáš
Simulation of space charge effects in electron optical systems based on the calculation of current density.
9th International Conference on Charged Particle Optics. Book of Abstracts. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014. s. 91. ISBN 978-80-87441-11-4.
[International Conference on Charged Parrticle Optics /9./. 31.08.2014-05.09.2014, Brno]
Institutional support: RVO:68081731
Keywords : space charge * current density evaluation * self-consistent computation * remeshing * FEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

We present a method improving accuracy of iterative computations of electron optical systems with space charge. We deal with two main sources of errors connected to the solving the Poisson equation and to the evaluation of the space charge distribution. We use the standard FEM method for solving the Poisson equation. The accuracy of this method depends strongly on the density of the mesh and the order of the shape functions. The simulated area generally contains all electrodes and lenses in the system and the resulting mesh is quite large. On the other hand, the mesh in the crossover areas that may move between iterations, has to be extremely fine. The number of mesh elements has to stay within the order of magnitude of millions, which can still be feasibly computed. An elegant solution is using the re-meshing algorithm based on, which adapts mesh in each iteration according to the actual space charge distribution.
Permanent Link: http://hdl.handle.net/11104/0236398