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Comparison of noise properties of laser sources intended for multidimensional interferometric tools
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SYSNO ASEP 0388105 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Comparison of noise properties of laser sources intended for multidimensional interferometric tools Author(s) Hrabina, Jan (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCIDNumber of authors 3 Source Title CPS 2012. 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proceedings of SPIE Vol.8697). - Bellingham : SPIE, 2012 - ISBN 978-0-8194-9481-8 Pages s. 869716: 1-10 Number of pages 10 s. Publication form Print - P Action CPS 2012. Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics /18./ Event date 03.09.2012-07.09.2012 VEvent location Ostravice Country CZ - Czech Republic Event type EUR Language eng - English Country US - United States Keywords interferometry ; lasers noise ; nanometrology ; atomic force microscopy Subject RIV BH - Optics, Masers, Lasers R&D Projects GPP102/11/P820 GA ČR - Czech Science Foundation (CSF) GA102/09/1276 GA ČR - Czech Science Foundation (CSF) KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) TA02010711 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 UT WOS 000319864100042 EID SCOPUS 84875959095 DOI 10.1117/12.2010115 Annotation This work is oriented towards investigation of displacement measurement uncertainty contribution of different laser sources that are suitable for powering multidimensional interferometric positioning system for local probe microscopy. Main aim of this work was to find a suitable laser source for this measuring system. Most common 633 nm He-Ne lasers were compared with 532 nm frequency-doubled Nd:YAGs of different construction (external cavity doubling, ring configuration laser). We investigated amplitude and frequency noise of several lasers intended for micro- and nano- CMMs (coordinate measurement machines) and compared their noise properties together with the aim to find the best option. Amplitude noise measurements were done directly with the help of low noise photodetector, frequency noise of tested lasers was measured by two approaches – first with the help of Fabry-Perot resonator, which was used as a frequency discriminator converting a frequency (phase) noise into the amplitude one and second directly with the help of interferometer – measuring of interferometric fringe signal and position evaluation – another type of frequency discriminator. Both frequency noise and also amplitude noise measurements were done simultaneously to have a chance to compare both approaches and results. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2013
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