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Influence of the gas used on amplification of signals in environmental SEM

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    SYSNO ASEP0205511
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleInfluence of the gas used on amplification of signals in environmental SEM
    Author(s) Romanovský, Vladimír (UPT-D)
    Neděla, Vilém (UPT-D) RID, ORCID, SAI
    Autrata, Rudolf (UPT-D)
    Source TitleProceedings of the 8th international seminar, held in Skalský dvůr / Frank L.. - Brno : Ústav přístrojové techniky Akademie věd České republiky, 2002 - ISBN 80-238-8986-9
    Pagess. 63 - 64
    Number of pages2 s.
    ActionRecent trends in charged particle optics and surface physics instrumentation
    Event date08.07.2002-12.07.2002
    VEvent locationSkalský dvůr
    CountryCZ - Czech Republic
    Event typeWRD
    Languageeng - English
    CountryCZ - Czech Republic
    Keywordswater containing speciments ; low pressure
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    R&D ProjectsGA102/01/1271 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z2065902 - UPT-D
    AnnotationCommercially available Environmental and Low Vacuum scanning electron microscopy permits a low pressure of gas in the specimen chamber. These instruments are possible to be used for observing of uncoated nonconductive or pure conductive or water containing specimens without the necessary dryingand using other special preparation techniques. Contemporarily, these microscopes come in use mainly in biology, medicine, as well as in the semiconductor industry.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2003

Number of the records: 1  

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