Number of the records: 1
Influence of the gas used on amplification of signals in environmental SEM
- 1.
SYSNO ASEP 0205511 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Influence of the gas used on amplification of signals in environmental SEM Author(s) Romanovský, Vladimír (UPT-D)
Neděla, Vilém (UPT-D) RID, ORCID, SAI
Autrata, Rudolf (UPT-D)Source Title Proceedings of the 8th international seminar, held in Skalský dvůr / Frank L.. - Brno : Ústav přístrojové techniky Akademie věd České republiky, 2002 - ISBN 80-238-8986-9 Pages s. 63 - 64 Number of pages 2 s. Action Recent trends in charged particle optics and surface physics instrumentation Event date 08.07.2002-12.07.2002 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords water containing speciments ; low pressure Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA102/01/1271 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z2065902 - UPT-D Annotation Commercially available Environmental and Low Vacuum scanning electron microscopy permits a low pressure of gas in the specimen chamber. These instruments are possible to be used for observing of uncoated nonconductive or pure conductive or water containing specimens without the necessary dryingand using other special preparation techniques. Contemporarily, these microscopes come in use mainly in biology, medicine, as well as in the semiconductor industry. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2003
Number of the records: 1