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Influence of the additional RF discharge on the properties of carbon nitride thin films deposited by PLD

  1. 1.
    SYSNO0134067
    TitleInfluence of the additional RF discharge on the properties of carbon nitride thin films deposited by PLD
    Author(s) Lančok, Ján (FZU-D) RID, ORCID
    Novotný, Michal (FZU-D) RID, ORCID, SAI
    Bulíř, Jiří (FZU-D) RID, ORCID, SAI
    Jelínek, Miroslav (FZU-D) RID, ORCID
    Zelinger, Zdeněk (UFCH-W) RID, ORCID
    Source TitleAdvanced Laser Technologies. s. 118-124. - Bellingham : SPIE International Society for Optical Engineering, 2002 / Dimitras D.C. ; Dinescu M. ; Konov V.I.
    ISBN0-8194-4528-2
    Conference ALT'01 International Conference on Advanced Laser Technologies, Constanta, 11.09.2001-14.09.2001
    Document TypeKonferenční příspěvek (zahraniční konf.)
    CEZAV0Z1010914 - FZU-D
    Languageeng
    CountryUS
    Keywords carbon nitride thin films * PLD * RF discharge
    Permanent Linkhttp://hdl.handle.net/11104/0032004
     

Number of the records: 1  

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