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Influence of the additional RF discharge on the properties of carbon nitride thin films deposited by PLD

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    LANČOK, J., NOVOTNÝ, M., BULÍŘ, J., JELÍNEK, M., ZELINGER, Z. Influence of the additional RF discharge on the properties of carbon nitride thin films deposited by PLD. ISBN 0-8194-4528-2. In: DIMITRAS, D.C., DINESCU, M., KONOV, V.I., eds. Advanced Laser Technologies. Bellingham: SPIE International Society for Optical Engineering, 2002, s. 118-124. Proceedings of SPIE., 4762. ISSN 0277-786X.

Number of the records: 1  

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