Number of the records: 1
RF magnetron sputtering of CNx thin films
- 1.0130970 - FZU-D 960318 RIV PL eng C - Conference Paper (international conference)
Hrdina, Jiří - Jastrabík, Lubomír - Fendrych, František - Sobota, Jaroslav
RF magnetron sputtering of CNx thin films.
Modern Plasma Surface Technology. Koszalin: Technical University of Koszalin, 1996 - (Precht, W.), s. 113-121. 83-86123-56-7.
[International Summer School Mielno'95: Modern Plasma Surface Technology /6./. Mielno (PL), 30.05.1995-01.06.1995]
Grant - others:Copernicus(XE) CIPA-CT94-0100
Permanent Link: http://hdl.handle.net/11104/0029074
Number of the records: 1