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Deposition of PZT Thin Films on Polymer Substrate by Means of Low Pressure Plasma Jet Systém
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SYSNO 0029810 Title Deposition of PZT Thin Films on Polymer Substrate by Means of Low Pressure Plasma Jet Systém Title Depozice tenkých vrstev PZTna polymerní substráty pomocí systému s nízkotlakou plazmatickou tryskou Author(s) Deyneka, Alexander (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Jastrabík, Lubomír (FZU-D) RID, ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Virostko, Petr (FZU-D)
Olejníček, Jiří (FZU-D) RID, ORCID
Suchaneck, G. (DE)
Gerlach, G. (DE)Source Title Ferroelectrics. Roč. 316, - (2005), s. 157-166. - : Taylor & Francis Document Type Článek v odborném periodiku Grant KJB1010301 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic GP202/02/D078 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic KJB1010302 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic CEZ AV0Z10100520 - FZU-D (2005-2011) AV0Z10100521 - FZU-D (2005-2011) Language eng Country GB Keywords ferroelectric thin films * spectral ellipsometry * hollow cathode sputtering Permanent Link http://hdl.handle.net/11104/0119603
Number of the records: 1