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Deposition of PZT Thin Films on Polymer Substrate by Means of Low Pressure Plasma Jet Systém
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SYSNO ASEP 0029810 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Deposition of PZT Thin Films on Polymer Substrate by Means of Low Pressure Plasma Jet Systém Title Depozice tenkých vrstev PZTna polymerní substráty pomocí systému s nízkotlakou plazmatickou tryskou Author(s) Deyneka, Alexander (FZU-D)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Jastrabík, Lubomír (FZU-D) RID, ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Virostko, Petr (FZU-D)
Olejníček, Jiří (FZU-D) RID, ORCID
Suchaneck, G. (DE)
Gerlach, G. (DE)Source Title Ferroelectrics. - : Taylor & Francis - ISSN 0015-0193
Roč. 316, - (2005), s. 157-166Number of pages 10 s. Language eng - English Country GB - United Kingdom Keywords ferroelectric thin films ; spectral ellipsometry ; hollow cathode sputtering Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects KJB1010301 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/02/D078 GA ČR - Czech Science Foundation (CSF) KJB1010302 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100520 - FZU-D (2005-2011) AV0Z10100521 - FZU-D (2005-2011) Annotation PbZrxTi1-xO3 (PZT} thin films were deposited by pulse modulated low pressure jet system on Pt-coated polymer substrates.PZT films were analyzed by XRD, spectral ellipsometry and electron mocroprobe Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2006
Number of the records: 1