Plasma polymer films rf sputtered from PTFE under various argon pressures

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SYSNO ASEP	0026589
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Plasma polymer films rf sputtered from PTFE under various argon pressures
Title	Plasmaticky nanášené vrstvy PTFE při různém tlaku argonu
Author(s)	Stelmashuk, Vitaliy (UFP-V)_RID Biederman, H. (CZ) Slavinská, D. (CZ) Zemek, Josef (FZU-D)_{RID, ORCID} Trchová, Miroslava (UMCH-V)_{RID, ORCID}
Source Title	Vacuum. - : Elsevier - ISSN 0042-207X Roč. 77, č. 2 (2005), s. 131-137
Number of pages	7 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	RF sputtering ; PTFE ; fluorcarbon plasma polymers ; thin film ; teflon ; deposition
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	OC 527.10 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	OC 527.90 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100521 - FZU-D (2005-2011)
	AV0Z20430508 - UFP-V (2005-2011)
Annotation	Fluorcarbon plasma polymer films were prepared by sputering of PTFE characterized by atomic force microscopy (AFM), x-ray photoelectron spectroscopy (XPS) and infrared (IR) spectroscopy.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2006

Number of the records: 1