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Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges
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SYSNO ASEP 0574651 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges Author(s) Antunes, V.G. (FR)
Rudolph, M. (DE)
Kapran, Anna (FZU-D) ORCID
Hajihoseini, H. (NL)
Raadu, M.A. (SE)
Brenning, N. (SE)
Gudmundsson, J.T. (IS)
Lundin, D. (SE)
Minea, T. (FR)Number of authors 9 Article number 075016 Source Title Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252
Roč. 32, č. 7 (2023)Number of pages 10 s. Language eng - English Country US - United States Keywords magnetron sputtering ; HiPIMS ; ionization region ; magnetic field ; optical emission spectroscopy Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 001038727700001 EID SCOPUS 85166488477 DOI 10.1088/1361-6595/ace847 Annotation The high power impulse magnetron sputtering (HiPIMS) discharge brings about increased ionization of the sputtered atoms due to an increased electron density and efficient electron energization during the active period of the pulse. The ionization is effective mainly within the electron trapping zone, an ionization region (IR), defined by the magnet configuration. Here, the average extension and the volume of the IR are determined based on measuring the optical emission from an excited level of the argon working gas atoms. For particular HiPIMS conditions, argon species ionization and excitation processes are assumed to be proportional. Hence, the light emission from certain excited atoms is assumed to reflect the IR extension. The light emission was recorded above a 100 mm diameter titanium target through a 763 nm bandpass filter using a gated camera. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2024 Electronic address https://doi.org/10.1088/1361-6595/ace847
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