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Pulse length dependence of a reactive high power impulse magnetron (HiPIMS) discharge
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SYSNO ASEP 0573076 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Pulse length dependence of a reactive high power impulse magnetron (HiPIMS) discharge Author(s) Hippler, Rainer (FZU-D) ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Mutzke, A. (DE)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAINumber of authors 4 Article number 055013 Source Title Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252
Roč. 32, č. 5 (2023)Number of pages 12 s. Language eng - English Country US - United States Keywords high power impulse magnetron sputtering ; reactive mode ; pulse length dependence ; ion composition ; optical emission spectroscopy Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA21-04477S GA ČR - Czech Science Foundation (CSF) Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 000999940400001 EID SCOPUS 85161561200 DOI 10.1088/1361-6595/acd5fc Annotation The pulse length dependence of a reactive high power impulse magnetron sputtering (HiPIMS) discharge with a tungsten cathode in an argon+oxygen gas mixture gas was investigated. The HiPIMS discharge is operated with a variable pulse length of 20–500 μs. Discharge current measurements, optical emission spectroscopy of neutral Ar, O, and W lines, and energy-resolved ion mass spectrometry are employed. A pronounced dependence of the discharge current on pulse length is noted while the initial discharge voltage is maintained constant. Energy-resolved mass spectrometry shows that the oxygen-to-tungsten (O+/W+) and the tungsten oxide-to-tungsten (WO+/W+) ion ratio decreases with pulse length due to target cleaning. Simulation results employing the SDTrimSP program show the formation of a non-stoichiometric sub-surface compound layer of oxygen which depends on the impinging ion composition and thus on the pulse length. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2024 Electronic address https://hdl.handle.net/11104/0346388
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