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Pulse length dependence of a reactive high power impulse magnetron (HiPIMS) discharge
- 1.0573076 - FZÚ 2024 RIV US eng J - Journal Article
Hippler, Rainer - Čada, Martin - Mutzke, A. - Hubička, Zdeněk
Pulse length dependence of a reactive high power impulse magnetron (HiPIMS) discharge.
Plasma Sources Science & Technology. Roč. 32, č. 5 (2023), č. článku 055013. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR(CZ) GA21-04477S
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : high power impulse magnetron sputtering * reactive mode * pulse length dependence * ion composition * optical emission spectroscopy
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.8, year: 2022
Method of publishing: Open access
Permanent Link: https://hdl.handle.net/11104/0346388File Download Size Commentary Version Access 0573076.pdf 0 2.5 MB CC licence Publisher’s postprint open-access
Number of the records: 1