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Pulse length dependence of a reactive high power impulse magnetron (HiPIMS) discharge
- 1.HIPPLER, Rainer, ČADA, Martin, MUTZKE, A., HUBIČKA, Zdeněk. Pulse length dependence of a reactive high power impulse magnetron (HiPIMS) discharge. Plasma Sources Science & Technology. 2023, 32(5), 055013. ISSN 0963-0252. E-ISSN 1361-6595. Available: doi: 10.1088/1361-6595/acd5fc.
Number of the records: 1