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Impact of sintering temperature on phase composition, microstructure, and porosification behavior of LTCC substrates
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SYSNO ASEP 0561898 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Impact of sintering temperature on phase composition, microstructure, and porosification behavior of LTCC substrates Author(s) Hajian, A. (DE)
Artemenko, Anna (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Schwarz, S. (DE)
Schneider, M. (AT)
Dragounová, Kateřina (FZU-D) ORCID
Adaikkan, M. (DE)
Zellner, C. (AT)
Schmid, U. (AT)Number of authors 9 Source Title Journal of the European Ceramic Society. - : Elsevier - ISSN 0955-2219
Roč. 42, č. 13 (2022), s. 5789-5800Number of pages 12 s. Language eng - English Country GB - United Kingdom Keywords LTCC ; sintering ; glass-ceramics ; porosification ; crystallization Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect) Research Infrastructure CzechNanoLab - 90110 - Vysoké učení technické v Brně Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 000832071300001 EID SCOPUS 85131102262 DOI 10.1016/j.jeurceramsoc.2022.05.049 Annotation Phase development and changes in crystalline composition of LTCC material during the sintering process were investigated using in-situ XRD measurements. The chemical characterization and microstructural analyses of the tapes sintered with some representative firing profiles were performed by techniques such as (scanning) transmission electron microscope, energy-dispersive X-ray spectroscopy, Raman spectroscopy, XPS, and XRD. Moreover, the porosification behavior of LTCC substrates fired at different peak temperatures was studied. These investigations are important for the subsequent wet chemical etching, representing an approach which allows to reduce locally the permittivity of LTCC tapes. Treatment with a KOH solution shows non-selective etching behavior for all substrates. In addition, highly porous silica structures corresponding to Ca and Al depletion from the anorthite phase were observed in all samples after etching treatment.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2023 Electronic address https://hdl.handle.net/11104/0334324
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