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Absolute interferometry for fast and precise radius measurement
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SYSNO ASEP 0560444 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Absolute interferometry for fast and precise radius measurement Author(s) Kredba, Jan (UFP-V) ORCID
Psota, Pavel (UFP-V) RID, ORCID
Stašík, Marek (UFP-V)
Lédl, Vít (UFP-V) RID
Veselý, Lukáš (UFP-V)
Nečásek, Jakub (UFP-V) ORCIDNumber of authors 6 Source Title Optics Express. - : Optical Society of America - ISSN 1094-4087
Roč. 29, č. 8 (2021), s. 12531-12542Number of pages 12 s. Language eng - English Country US - United States Keywords interferometry ; radius measurement ; cavity Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects EF16_026/0008390 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support UFP-V - RVO:61389021 UT WOS 000640033600094 EID SCOPUS 85104380955 DOI 10.1364/OE.420372 Annotation A novel radius of the curvature measurement method for optical spherical surfaces using absolute interferometry is proposed. A measurement setup is designed and built around a common-path Fizeau interferometer. The cavity length (volume of air between reference and tested surfaces) can be measured by the absolute wavelength tuning interferometry. An interconnection of data from three different tunable laser diodes (central wavelengths 780, 785 and 852 nm) allows us to measure the cavity length with uncertainty from tens to hundreds of nanometres. Once the reference radius of curvature is known/measured/calibrated, the radius of surface under test can be computed applying the value of the cavity length. The radius of curvature is measured directly in confocal position of the interferometer with relative precision of about 10 ppm. Moreover, unlike standard radius measurement by interferometry, the uncertainty of the introduced method can be optimized by selecting a suitable transmission sphere. In the paper, the method is described, tested, and verified by measuring several specimens featuring different radii of curvature. The results are analysed and furthermore compared to other measurement device. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2023 Electronic address https://opg.optica.org/oe/fulltext.cfm?uri=oe-29-8-12531&id=449973
Number of the records: 1