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Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications
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SYSNO 0540754 Title Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications Author(s) Zehetner, J. (AT)
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Izsák, Tibor (FZU-D) ORCID
Vanko, G. (SK)
Gajdošová, L. (AT)
Kasemann, S. (AT)Source Title Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems. S. 1-3. - Basel : MDPI, 2020 / Köck A. ; Deluca M. Conference International Conference on Functional Integrated nano Systems (nanoFIS 2020) /4./, 02.11.2020 - 04.11.2020, Online Article number 13 Document Type Konferenční příspěvek (zahraniční konf.) Grant 8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic Institutional support FZU-D - RVO:68378271 Language eng Country CH Keywords diamond * GaN * MEMS * laser ablation Permanent Link http://hdl.handle.net/11104/0318359
Number of the records: 1