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Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications
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SYSNO ASEP 0540754 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications Author(s) Zehetner, J. (AT)
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Izsák, Tibor (FZU-D) ORCID
Vanko, G. (SK)
Gajdošová, L. (AT)
Kasemann, S. (AT)Number of authors 6 Article number 13 Source Title Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems. - Basel : MDPI, 2020 / Köck A. ; Deluca M. Pages s. 1-3 Number of pages 3 s. Publication form Online - E Action International Conference on Functional Integrated nano Systems (nanoFIS 2020) /4./ Event date 02.11.2020 - 04.11.2020 VEvent location Online Country AT - Austria Event type WRD Language eng - English Country CH - Switzerland Keywords diamond ; GaN ; MEMS ; laser ablation Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects 8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 DOI 10.3390/proceedings2020056013 Annotation We present the feasibility to fabricate membranes and cantilevers made of diamond grown on Si/SiO2 substrates by femtosecond laser ablation. In the ablation process, we generated nano‐ and microstructures on the membrane surface. Such laser induced periodic surface structures (LIPSS) are useful in tailoring the surface chemistry. In combination with wet‐ or reactive ion etching smooth membranes were generated. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2021
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