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Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications
- 1.ZEHETNER, J., KROMKA, Alexander, IZSÁK, Tibor, VANKO, G., GAJDOŠOVÁ, L., KASEMANN, S. Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications. In: KÖCK, A., DELUCA, M., eds. Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems. Basel: MDPI, 2020, s. 1-3, č. článku 13. E-ISSN 2504-3900. Available: doi: 10.3390/proceedings2020056013
Number of the records: 1