Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge

Number of the records: 1

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SYSNO	0533967
Title	Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
Author(s)	Hippler, Rainer (FZU-D)_ORCID Čada, Martin (FZU-D)_{RID, ORCID, SAI} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Source Title	Applied Physics Letters. Roč. 116, č. 6 (2020), s. 1-4. - : AIP Publishing
Article number	064101
Document Type	Článek v odborném periodiku
Grant	CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	GA19-00579S GA ČR - Czech Science Foundation (CSF)
	FV30177 GA MPO - Ministry of Industry and Trade (MPO)
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	US
Keywords	plasma * HiPIMS sputtering * Langmuir probe
URL	https://doi.org/10.1063/1.5140650
Permanent Link	http://hdl.handle.net/11104/0312191

Number of the records: 1