Number of the records: 1
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
- 1.
SYSNO ASEP 0533967 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge Author(s) Hippler, Rainer (FZU-D) ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Hubička, Zdeněk (FZU-D) RID, ORCID, SAINumber of authors 3 Article number 064101 Source Title Applied Physics Letters. - : AIP Publishing - ISSN 0003-6951
Roč. 116, č. 6 (2020), s. 1-4Number of pages 4 s. Language eng - English Country US - United States Keywords plasma ; HiPIMS sputtering ; Langmuir probe Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA19-00579S GA ČR - Czech Science Foundation (CSF) FV30177 GA MPO - Ministry of Industry and Trade (MPO) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 000538749400001 EID SCOPUS 85079530666 DOI 10.1063/1.5140650 Annotation High power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in argon gas was investigated by time-resolved electrical (Langmuir) probe diagnostics and by time-integrated energy-resolved mass spectrometry. The HiPIMS discharge was operated with a bipolar pulsed power supply. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2021 Electronic address https://doi.org/10.1063/1.5140650
Number of the records: 1