Number of the records: 1
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
- 1.Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge.
Applied Physics Letters. Roč. 116, č. 6 (2020), s. 1-4, č. článku 064101. ISSN 0003-6951. E-ISSN 1077-3118
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.791, year: 2020
Method of publishing: Limited access
https://doi.org/10.1063/1.5140650
http://hdl.handle.net/11104/0312191
Number of the records: 1