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Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
- 1.HIPPLER, R., ČADA, M., HUBIČKA, Z. Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge. Applied Physics Letters. 2020, 116(6), 1-4), 064101. ISSN 0003-6951. E-ISSN 1077-3118. Available: doi: 10.1063/1.5140650.
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