Number of the records: 1
Functional nano-structuring of thin silicon nitride membranes
- 1.Matějka, Milan - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Functional nano-structuring of thin silicon nitride membranes.
Journal of Electrical Engineering - Elektrotechnický časopis. Roč. 71, č. 2 (2020), s. 127-130. ISSN 1335-3632. E-ISSN 1339-309X
OECD category: Nano-processes (applications on nano-scale)
Impact factor: 0.647, year: 2020
Method of publishing: Open access
https://content.sciendo.com/view/journals/jee/71/2/article-p127.xml
http://hdl.handle.net/11104/0309382
Number of the records: 1