Number of the records: 1
Cathode voltage and discharge current oscillations in HiPIMS
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SYSNO 0486975 Title Cathode voltage and discharge current oscillations in HiPIMS Author(s) Klein, P. (CZ)
Hnilica, J. (CZ)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Šlapanská, M. (CZ)
Zemánek, M. (CZ)
Vašina, P. (CZ)Source Title Plasma Sources Science & Technology. Roč. 26, č. 5 (2017), s. 1-12. - : Institute of Physics Publishing Article number 055015 Document Type Článek v odborném periodiku Grant GA15-00863S GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic Institutional support FZU-D - RVO:68378271 Language eng Country GB Keywords HiPIMS * voltage and current oscillations * spokes Permanent Link http://hdl.handle.net/11104/0281682
Number of the records: 1