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Cathode voltage and discharge current oscillations in HiPIMS
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SYSNO ASEP 0486975 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Cathode voltage and discharge current oscillations in HiPIMS Author(s) Klein, P. (CZ)
Hnilica, J. (CZ)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Šlapanská, M. (CZ)
Zemánek, M. (CZ)
Vašina, P. (CZ)Number of authors 7 Article number 055015 Source Title Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252
Roč. 26, č. 5 (2017), s. 1-12Number of pages 12 s. Language eng - English Country GB - United Kingdom Keywords HiPIMS ; voltage and current oscillations ; spokes Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) R&D Projects GA15-00863S GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000398394500002 EID SCOPUS 85018343394 DOI 10.1088/1361-6595/aa62ee Annotation This paper reports on the oscillations both on the cathode voltage and on the discharge current which emerged suddenly and simultaneously during a. high- power impulse magnetron sputtering pulse. Detailed. experiments identified the pressure and the discharge current ranges to detect these oscillations. The oscillations. originated. from the magnetized plasma and their frequency ranged from 225 kHz to 400 kHz depending on the experimental conditions. Simultaneous measurement of both oscillations and spokes was conducted to find mutual correlations. The oscillations always accompanied the spokes and no particular conditions to detect oscillations in the. absence of. spokes were found. The oscillations were not caused by the rotational motion of the spokes but. emerged when a. certain threshold amount of spokes was overreached. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
Number of the records: 1