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Cathode voltage and discharge current oscillations in HiPIMS
- 1.Klein, P., Hnilica, J., Hubička, Z., Čada, M., Šlapanská, M., Zemánek, M., Vašina, P. Cathode voltage and discharge current oscillations in HiPIMS. Plasma Sources Science & Technology. 2017, 26(5), 1-12), 055015. ISSN 0963-0252. E-ISSN 1361-6595. Available: doi: 10.1088/1361-6595/aa62ee
Number of the records: 1