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Cathode voltage and discharge current oscillations in HiPIMS
- 1.KLEIN, P., HNILICA, J., HUBIČKA, Z., ČADA, M., ŠLAPANSKÁ, M., ZEMÁNEK, M., VAŠINA, P. Cathode voltage and discharge current oscillations in HiPIMS. Plasma Sources Science & Technology. 2017, 26(5), 1-12), 055015. ISSN 0963-0252. E-ISSN 1361-6595. Available: doi: 10.1088/1361-6595/aa62ee
Number of the records: 1