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In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves
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SYSNO ASEP 0469096 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves Author(s) Grabec, T. (CZ)
Sedlák, Petr (UT-L) RID, ORCID
Stoklasová, Pavla (UT-L) RID, ORCID
Thomasová, M. (CZ)
Shilo, D. (IL)
Kabla, M. (IL)
Seiner, Hanuš (UT-L) RID, ORCID
Landa, Michal (UT-L) RIDNumber of authors 8 Article number 127002 Source Title Smart Materials and Structures. - : Institute of Physics Publishing - ISSN 0964-1726
Roč. 25, č. 12 (2016)Number of pages 7 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords thin films ; shape memory alloys ; surface acoustic waves Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GA14-15264S GA ČR - Czech Science Foundation (CSF) Institutional support UT-L - RVO:61388998 UT WOS 000388623800001 EID SCOPUS 84995608141 DOI 10.1088/0964-1726/25/12/127002 Annotation The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables the. determination of the. local properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of the. Young's modulus, and can. thus be. used for monitoring of the spatial distribution of the. functional properties in films prepared by a combinatorial sputtering approach. Workplace Institute of Thermomechanics Contact Marie Kajprová, kajprova@it.cas.cz, Tel.: 266 053 154 ; Jana Lahovská, jaja@it.cas.cz, Tel.: 266 053 823 Year of Publishing 2017
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