The information depth of backscattered electron imaging

0460208 - ÚPT 2017 RIV CZ eng C - Conference Paper (international conference)
Piňos, Jakub - Mikmeková, Šárka - Frank, Luděk
The information depth of backscattered electron imaging.
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments CAS, 2016 - (Mika, F.), s. 46-47. ISBN 978-80-87441-17-6.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./. Skalský dvůr (CZ), 29.05.2016-03.06.2016]
Institutional support: RVO:68081731
Keywords : electron microscopy * SEM * BSE
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.trends.isibrno.cz/

Of the conventional imaging signals in the scanning electron microscope (SEM), the secondary electrons generally reflect surface properties of the sample, while the backscattered electrons (BSE) are capable of providing information about complex properties of the target down to a certain subsurface depth. Contrast mechanisms are combined according to the energy of incident electrons and energy and angular acceptance of BSE detection. In all cases, a question arises concerning the information depth of this mode. No applicable answer provides a definition declaring this depth as that from which we still obtain useful information about the object. We can employ software simulating the electron scattering in solids,
while experimental approaches are also possible. Moreover, two analytic formulas can be found in the literature.
Permanent Link: http://hdl.handle.net/11104/0260340