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Short-range six-axis interferometer controlled positioning for local probe microscopy
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SYSNO ASEP 0426199 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Short-range six-axis interferometer controlled positioning for local probe microscopy Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAINumber of authors 6 Source Title 21th annual International Conference on Advanced Laser Technologies ALT´13. Book of Abstracts. - Budva : University of Montenegro, 2013 Number of pages 1 s. Publication form Online - E Action ALT´13. Annual International Conference on Advanced Laser Technologies /21./ Event date 16.09.2013-20.09.2013 VEvent location Budva Country ME - Montenegro Event type WRD Language eng - English Country ME - Montenegro Keywords SIX-AXIS interferometer ; local probe microscopy Subject RIV BH - Optics, Masers, Lasers R&D Projects GPP102/11/P820 GA ČR - Czech Science Foundation (CSF) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EE2.4.31.0016 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) TA02010711 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 Annotation We present a design of nanometrology measuring setup is part of a design of the national standard for nanometrology to be operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system uses a full six-axis interferometric measurement of the position of the sample holder with six independent interferometers. The concept of nanometrology system combining local probe microscopy and interferometric measuring and controlled positioning presented here represents one of a variety of possible approaches. A small range system based on a commercial nanopositioning stage driven by piezoelectric transducers with the overall range 200×200×10 μm was used. Due to the geometric configuration with a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup goes down to tens of nanoradians and servo control of in all six axes of freedom allows to keep guidance errors below 100 nrad. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2015
Number of the records: 1