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Large area growth of functional and electronic-grade diamond thin films - today's reality
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SYSNO 0399675 Title Large area growth of functional and electronic-grade diamond thin films - today's reality Author(s) Kromka, Alexander (FZU-D) RID, ORCID, SAI
Babchenko, Oleg (FZU-D) RID, ORCID
Ižák, Tibor (FZU-D) RID
Varga, Marián (FZU-D) RID, ORCID
Potocký, Štěpán (FZU-D) RID, ORCID
Rezek, Bohuslav (FZU-D) RID, ORCIDSource Title Progresívne materiály a vákuum ( Progressive materials and vacuum). S. 11-14. - Bratislava : Slovenská vakuová spolocnosť, 2012 / Varga M. ; Veselý M. ; Vincze A. Conference School of Vacuum Technology /15./ ( Progressive materials and vacuum), Štrbské pleso, 08.11.2012-11.11.2012 Document Type Konferenční příspěvek (zahraniční konf.) Grant GAP108/11/0794 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic GAP108/12/0910 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Language eng Country SK Keywords diamond thin films * large area deposition * linear plasma * pressure Permanent Link http://hdl.handle.net/11104/0226900
Number of the records: 1