Mass spectrometric characterizations of ions generated in RF magnetron discharges during sputtering of silver in Ne, Ar, Kr and Xe gases

Number of the records: 1

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SYSNO	0397579
Title	Mass spectrometric characterizations of ions generated in RF magnetron discharges during sputtering of silver in Ne, Ar, Kr and Xe gases
Author(s)	Pokorný, D. (DE) Novotný, Michal (FZU-D)_{RID, ORCID, SAI} Musil, Jindřich (FZU-D)_{RID, ORCID} Fitl, Přemysl (FZU-D)_{RID, ORCID} Bulíř, Jiří (FZU-D)_{RID, ORCID, SAI} Lančok, Ján (FZU-D)_{RID, ORCID}
Source Title	Plasma Processes and Polymers. Roč. 10, č. 7 (2013), s. 593-602. - : Wiley
Document Type	Článek v odborném periodiku
Grant	GAP108/11/1298 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
	GAP108/11/1312 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
	GAP108/11/0958 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
	M100101271, CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	DE
Keywords	double charge ions * mass spectrometry * noble gas * RF magnetron discharges * silver * single charge ions
Permanent Link	http://hdl.handle.net/11104/0225197

Number of the records: 1