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Mass spectrometric characterizations of ions generated in RF magnetron discharges during sputtering of silver in Ne, Ar, Kr and Xe gases
- 1.Pokorný, D. - Novotný, Michal - Musil, Jindřich - Fitl, Přemysl - Bulíř, Jiří - Lančok, Ján
Mass spectrometric characterizations of ions generated in RF magnetron discharges during sputtering of silver in Ne, Ar, Kr and Xe gases.
Plasma Processes and Polymers. Roč. 10, č. 7 (2013), s. 593-602. ISSN 1612-8850. E-ISSN 1612-8869
Impact factor: 2.964, year: 2013
http://hdl.handle.net/11104/0225197
Number of the records: 1