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Mass spectrometric characterizations of ions generated in RF magnetron discharges during sputtering of silver in Ne, Ar, Kr and Xe gases
- 1.Pokorný, D., Novotný, M., Musil, J., Fitl, P., Bulíř, J., Lančok, J. Mass spectrometric characterizations of ions generated in RF magnetron discharges during sputtering of silver in Ne, Ar, Kr and Xe gases. Plasma Processes and Polymers. 2013, 10(7), 593-602. ISSN 1612-8850. E-ISSN 1612-8869. Available: doi: 10.1002/ppap.201200145
Number of the records: 1