Analysis of electron current instability in E-beam writer

0390975 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Bok, Jan - Horáček, Miroslav - Král, Stanislav - Kolařík, Vladimír - Matějka, František
Analysis of electron current instability in E-beam writer.
NANOCON 2012, 4th International Conference Proceedings. Ostrava: TANGER Ltd, 2012, s. 295-299. ISBN 978-80-87294-32-1.
[NANOCON 2012. International Conference /4./. Brno (CZ), 23.10.2012-25.10.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA TA ČR TE01020118; GA MPO FR-TI1/576
Institutional support: RVO:68081731
Keywords : electron beam * current measurement * current drift and noise * fourier analysis
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The electron beam writer Tesla BS600 works with a thermal-field electron emitter, fixed electron energy of 15 keV and a rectangular shaped variable-size electron beam. The size of the shaped beam (stamp) can be set from 50 to 6300 nm in standard mode and from 16 to 2100 nm in high-resolution mode. The basic increment of the stamp size is 50 nm, resp. 16 nm. Electron current density inhomogeneity and long-term instability in stamps can have negative impact on the exposure quality. Therefore, we focused on a study of the current time instability. The current density in variously sized stamps was measured by a picoammeter and a PIN diode video channel as a function of time. We analyzed short-term and long-term current instabilities using filtering techniques, as well as the Fourier analysis. Based on the results, we could be able to find reasons of the current instabilities and to propose improvements to achieve higher exposure quality.
Permanent Link: http://hdl.handle.net/11104/0219831