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Estimation of mechanical properties of thin Al surface layer
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SYSNO ASEP 0387893 Document Type K - Proceedings Paper (Czech conf.) R&D Document Type Conference Paper Title Estimation of mechanical properties of thin Al surface layer Author(s) Petráčková, Klára (UFM-A)
Kuběna, Ivo (UFM-A) RID, ORCID
Truhlář, Michal (UFM-A)
Náhlík, Luboš (UFM-A) RID, ORCID
Kruml, Tomáš (UFM-A) RID, ORCIDNumber of authors 5 Source Title 14th International conference Applied Mechanics 2012 - Conference proceedings. - Plzeň : Západočeská univerzita v Plzni, 2012 / Lukeš V. ; Hajžman M. ; Byrtus M. - ISBN 978-80-261-0097-3
S. 117-120Number of pages 4 s. Publication form Print - P Action Applied Mechanics 2012 Event date 16.04.2012-18.04.2012 VEvent location Plzeň Country CZ - Czech Republic Event type EUR Language eng - English Country CZ - Czech Republic Keywords microcompression ; thin film properties ; focused ion beam ; FEM modelling Subject RIV JL - Materials Fatigue, Friction Mechanics Institutional support UFM-A - RVO:68081723 CEZ AV0Z20410507 - UFM-A (2005-2011) Annotation The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 μm and their height was about 2 μm. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties. Workplace Institute of Physics of Materials Contact Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Year of Publishing 2013
Number of the records: 1