Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

Number of the records: 1

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SYSNO	0364652
Title	Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering
Author(s)	Suchaneck, G. (DE) Labitzke, R. (DE) Adolphi, B. (DE) Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Adámek, Petr (FZU-D)_{RID, ORCID} Drahokoupil, Jan (FZU-D)_{RID, ORCID} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Kiselev, D.A. (PT) Kholkin, A. L. (PT) Gerlach, G. (DE) Dejneka, Alexandr (FZU-D)_{RID, ORCID}
Source Title	Surface and Coatings Technology. Roč. 205, č. 2 (2011), S241-S244. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	GC202/09/J017 GA ČR - Czech Science Foundation (CSF)
	KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Language	eng
Country	CH
Keywords	pulsed DC reactive sputtering * RF reactive sputtering * complex oxide film deposition * polymer substrate
Permanent Link	http://hdl.handle.net/11104/0200083

Number of the records: 1