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Piezoelectric PZT thin films on flexible copper-coated polymer films
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SYSNO ASEP 0336533 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Piezoelectric PZT thin films on flexible copper-coated polymer films Title Piezoelektrické tenké vrstvy PZT na flexibilních mědí pokrytých polymerních foliích Author(s) Suchaneck, G. (DE)
Volkonskiy, O. (DE)
Gerlach, G. (DE)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Dejneka, Alexandr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Kiselev, D. (PT)
Bdikin, I. (PT)
Kholkin, A. (PT)Number of authors 9 Source Title Materials Science Forum - ISSN 0255-5476
636/637, - (2010), s. 392-397Number of pages 6 s. Language eng - English Country CH - Switzerland Keywords plasma jet deposition ; PZT ; kapton® film substrate ; piezoresponse force microscopy Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GC202/09/J017 GA ČR - Czech Science Foundation (CSF) KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100522 - FZU-D (2005-2011) DOI 10.4028/www.scientific.net/MSF.636-637.392 Annotation This work analyzes the processing of Pb(Zr,Ti)O3 (PZT) thin films directly on copper-coated polymer films. PZT thin film deposition was performed onto the metallized Kapton® films using a single RF plasma jet. In order to reduce the interaction of PZT and Cu during the initial growth stage, an ultrathin amorphous TiOx seeding layer was sputter-deposited prior to PZT deposition.Topography and piezoelectric response of the films were evaluated using a commercial AFM adapted for piezoforce measurements.The as-deposited films were self-polarized with a piezoelectric hysteresis. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2010
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