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Měření mechanických vlastností tenkých vrstev pomocí nanokomprese

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    0314417 - ÚFM 2009 RIV CZ cze K - Conference Paper (Czech conference)
    Kuběna, Ivo - Kruml, Tomáš - Hutař, Pavel - Boháč, Petr - Stranyánek, Martin - Čtvrtlík, Radim - Pánek, P. - Vystavěl, T.
    Měření mechanických vlastností tenkých vrstev pomocí nanokomprese.
    [Measurement of mechanical properties of thin films by nanocompression.]
    Vrstvy a povlaky 2008. Rožnov pod Radhoštěm: LISS, a.s., 2008, s. 103-108. ISBN 978-80-969310-7-1.
    [Vrstvy a povlaky 2008. Rožnov pod Radhoštěm (CZ), 29.09.2008-30.09.2008]
    Institutional research plan: CEZ:AV0Z20410507; CEZ:AV0Z10100522
    Keywords : nanocompression * Al thin film * yield point
    Subject RIV: JJ - Other Materials

    Technikou fokusovaných iontových byly připraveny malé kompresní válcové vzorky z tenké vrstvy Al-1.5%Cu. Tyto vzorky byly deformovány v kompresi s použitím nanoindentoru a plochého diamantového hrotu. Byly tak získány závislosti napětí-deformace s poměrně vysokou přesností.

    Mechanical properties of thin films are not easy to be measured. This is particularly true in the case of plastic properties as the yield point, the work hardening rate or the ultimate stress. Nevertheless, such parameters are needed e.g. in the design of integrated circuits where the thermal stresses may lead to mechanical failure of the component. We applied two modern experimental facilities, the focused ion beam and the nanoindentation for exact measurement of plastic properties of a Al-1.5%Cu thin film prepared by PVD, used for electrical connection of integrated circuits. By FIB milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 m) and their diameter was about 1.3 m. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. Stress-strain curves of the film were obtained rather precisely.
    Permanent Link: http://hdl.handle.net/11104/0004821

     
     
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