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Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering
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SYSNO 0133760 Title Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering Author(s) Shaginyan, L. R. (UA)
Mišina, Martin (FZU-D)
Zemek, Josef (FZU-D) RID, ORCID
Musil, Jindřich (FZU-D) RID, ORCID
Regent, F. (CZ)
Britun, V. F. (UA)Source Title Thin Solid Films. Roč. 408, - (2002), s. 136-147. - : Elsevier Document Type Článek v odborném periodiku Grant GV106/96/K245 GA ČR - Czech Science Foundation (CSF) GA106/99/D086 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z1010914 - FZU-D Language eng Country NL Keywords hardness * sputtering * nitrides * alloys Permanent Link http://hdl.handle.net/11104/0031719
Number of the records: 1