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Nondestructive investigatons of the depth profile of PZT ferroelectric films
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SYSNO ASEP 0133692 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Nondestructive investigatons of the depth profile of PZT ferroelectric films Author(s) Deineka, Alexander (FZU-D)
Glinchuk, M. D. (UA)
Jastrabík, Lubomír (FZU-D) RID, ORCID
Suchaneck, G. (DE)
Gerlach, G. (DE)Source Title Ferroelectrics. - : Taylor & Francis - ISSN 0015-0193
Roč. 264, - (2001), s. 151-156Number of pages 6 s. Language eng - English Country GB - United Kingdom Keywords ferroelectric film ; depth profile ; interface Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA202/00/1425 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z1010914 - FZU-D Annotation Investigations of PbZr0.235O3 (PZT) films of perovskite (pe) and pyrochlore (py) structure deposited onto Si/Si/O2/ adhesion layer/(111) Pt substrate by RF sputtering were performed with J. A. Woollam spectral ellipsometer. Experimental data were compared with theoretical predictions. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2002
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