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Au incorporation into various ZnO crystallographic cuts realised by ion implantation - ZnO damage characterization
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SYSNO ASEP 0511855 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Au incorporation into various ZnO crystallographic cuts realised by ion implantation - ZnO damage characterization Author(s) Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAI
Jagerová, Adéla (UJF-V) ORCID, SAI
Mikšová, Romana (UJF-V) RID, ORCID, SAI
Nekvindová, P. (CZ)
Cajzl, J. (CZ)
Bottger, R. (DE)
Akhmadaliev, S. (DE)Number of authors 8 Article number UNSP 108892 Source Title Vacuum. - : Elsevier - ISSN 0042-207X
Roč. 169, č. 11 (2019)Number of pages 9 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords ZnO ; RBS ; ion implantation Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders OECD category Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect) R&D Projects LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA18-03346S GA ČR - Czech Science Foundation (CSF) Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000494887000044 EID SCOPUS 85071987675 DOI 10.1016/j.vacuum.2019.108892 Annotation This paper presents a study of defect evolution in various ZnO crystallographic cuts caused by Au implantation. The investigation has focused on ZnO structure characterisation, Au distribution and the interior morphology of the a-, m- and c-planes ZnO single crystals implanted with 400 keV Au+ ions at the ion fluences of 5 x 10(14) and 1 x 10(15) cm(-2) and subsequently annealed at 600 degrees C in O-2. The structure modification was studied using Rutherford backscattering spectrometry in the channelling mode and Raman spectroscopy. After the ion-implantation process, low surface damage was observed in all ZnO orientations unlike deep structural damage. Deep structural damage grew with increased Au-ion fluence and Au did not exhibit strong out-diffusion from the depth to the surface during the post-implantation annealing. Small but noticeable differences were observed between different ZnO orientations. RBS measurements during ion implantation revealed more progressive deep-damage formation in the c- and m-planes than in the a-plane ZnO. Simultaneously, the smallest Zn sub-lattice disorder deduced from RBS/C measurements was observed in the a-plane ZnO. During post-implantation annealing, a slight structure recovery (about 4%) was observed in all orientations. Raman spectroscopy confirmed the increasing structure disorder with the enhanced ion fluence for all as-implanted ZnO orientations and a partial reconstruction of the ZnO structure during annealing, when the intensity of E-2 phonons was increased and that of longitudinal optical (LO) phonons was suppressed because of the disorder recovery. E-2 (high) and E-1 (LO) Raman phonon modes connected with oxygen sub-lattice ordering/disordering have been investigated in detail - they show a significant modification mainly in the m-plane. The cause of the different behaviour of ZnO planes as well as the differences in the incorporation and movement of Au and Er atoms in the ZnO structure are discussed in the work. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2020 Electronic address https://doi.org/10.1016/j.vacuum.2019.108892
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