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Exploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators
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SYSNO ASEP 0483361 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Exploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators Author(s) Stachiv, Ivo (FZU-D) RID, ORCID
Šittner, Petr (FZU-D) RID, ORCID
Olejníček, Jiří (FZU-D) RID, ORCID
Landa, M. (CZ)
Heller, Luděk (FZU-D) RID, ORCIDNumber of authors 5 Article number 213105 Source Title Applied Physics Letters. - : AIP Publishing - ISSN 0003-6951
Roč. 111, č. 21 (2017), s. 1-5Number of pages 5 s. Language eng - English Country US - United States Keywords equipment and apparatus ; microactuators ; smart materials ; continuum mechanics ; sensors Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects GC15-13174J GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000416008000025 EID SCOPUS 85035200092 DOI 10.1063/1.4998006 Annotation Shape memory alloy (SMA) films are very attractive materials for microactuators because of their high energy density. However, all currently developed SMA actuators utilize martensitic transformation activated by periodically generated heating and cooling, therefore, they have a slow actuation speed, just a few Hz, which restricts their use in most of the nanotechnology applications such as high frequency microcantilever based physical and chemical sensors, atomic force microscopes, or RF filters. Here, we design tunable high frequency SMA microcantilevers for nanotechnology applications. They consist of a phase transforming NiTi SMA film sputtered on the common elastic substrate material, in our case, it is a single-crystal silicon. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
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