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Exploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators

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    SYSNO ASEP0483361
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JČlánek ve WOS
    TitleExploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators
    Author(s) Stachiv, Ivo (FZU-D) RID, ORCID
    Šittner, Petr (FZU-D) RID, ORCID
    Olejníček, Jiří (FZU-D) RID, ORCID
    Landa, M. (CZ)
    Heller, Luděk (FZU-D) RID, ORCID
    Number of authors5
    Article number213105
    Source TitleApplied Physics Letters. - : AIP Publishing - ISSN 0003-6951
    Roč. 111, č. 21 (2017), s. 1-5
    Number of pages5 s.
    Languageeng - English
    CountryUS - United States
    Keywordsequipment and apparatus ; microactuators ; smart materials ; continuum mechanics ; sensors
    Subject RIVBM - Solid Matter Physics ; Magnetism
    OECD categoryCondensed matter physics (including formerly solid state physics, supercond.)
    R&D ProjectsGC15-13174J GA ČR - Czech Science Foundation (CSF)
    Institutional supportFZU-D - RVO:68378271
    UT WOS000416008000025
    EID SCOPUS85035200092
    DOI10.1063/1.4998006
    AnnotationShape memory alloy (SMA) films are very attractive materials for microactuators because of their high energy density. However, all currently developed SMA actuators utilize martensitic transformation activated by periodically generated heating and cooling, therefore, they have a slow actuation speed, just a few Hz, which restricts their use in most of the nanotechnology applications such as high frequency microcantilever based physical and chemical sensors, atomic force microscopes, or RF filters. Here, we design tunable high frequency SMA microcantilevers for nanotechnology applications. They consist of a phase transforming NiTi SMA film sputtered on the common elastic substrate material, in our case, it is a single-crystal silicon.
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2018
Number of the records: 1  

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