New detectors for low-energy BSE

0460204 - ÚPT 2017 RIV CZ eng C - Conference Paper (international conference)
Lalinský, Ondřej - Schauer, Petr - Kučera, M. - Hanuš, M. - Lučeničová, Z.
New detectors for low-energy BSE.
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments CAS, 2016 - (Mika, F.), s. 34-35. ISBN 978-80-87441-17-6.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./. Skalský dvůr (CZ), 29.05.2016-03.06.2016]
R&D Projects: GA TA ČR(CZ) TE01020118; GA ČR(CZ) GA16-05631S; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : BSE detector * cathodoluminescence * low-energy electron * scintillator
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.trends.isibrno.cz/

Backscattered electrons (BSE) are mostly used to study the specimen’s topography. Nowadays, low energy (units of keV) electron beam imaging is often necessary for example for the research of nanomaterials, biomaterials or semiconductors. Because BSE detectors are mostly non-accelerating or low-accelerating, electrons with approximately the same energy as primary beam (PB) have to be detected. Therefore, BSE detectors need to become optimized for such low-energy electrons. For the scintillation detectors, the biggest problem probably lies in the scintillator. Semiconductor detectors aren’t studied in this work. Cerium activated bulk single crystals of yttrium aluminium garnet (YAG:Ce)Ce(X):Y(3-X)Al(5)O(12) are widely used as scintillators for the detection of high-energy backscattered electrons (BSE). However, commonly used YAG:Ce single crystal strongly loses its light yield (LY) with the decrease of the PB energy. As possible available alternatives for this application, bulk single crystals of yttrium aluminium perovskite (YAP:Ce) Ce(x)Y(1-X)AlO(3) and CRY018 can be predicted. However, similar LY drop can be expected also with these scintillators.
Permanent Link: http://hdl.handle.net/11104/0260336