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Formation of excited Ag atoms in sputtering of silver
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SYSNO ASEP 0411215 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Formation of excited Ag atoms in sputtering of silver Author(s) Šroubek, Zdeněk (URE-Y)
Šroubek, Filip (UTIA-B) RID, ORCID
Wucher, A. (DE)
Yarmoff, J. A. (US)Source Title Physical Review. B - ISSN 1098-0121
Roč. 68, č. 11 (2003), s. 1-5Number of pages 5 s. Language eng - English Country US - United States Keywords electronic excitation ; sputtering Subject RIV BM - Solid Matter Physics ; Magnetism CEZ AV0Z1075907 - UTIA-B Annotation A model is presented for the formation of excited Ag atoms during sputtering of Ag metal by energetic Ar ions. The essential part of the formation process is the slow diffusion of 4d holes in the collision cascade from the sites of violent Ag-Ag collisions to the emitted Ag atoms. A computer simulation of Ag cascades and of the 4d-hole transport allows us to quantify the model and to describe all characteristic features of the available experimental data. Workplace Institute of Information Theory and Automation Contact Markéta Votavová, votavova@utia.cas.cz, Tel.: 266 052 201.
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